Engineered Ceramics China Ltd. is equipped to handle the ever-growing demand of the semiconductor processing industry. We support 100mm, 130mm, 150mm, 200mm and 300mm wafer systems. Our specialized technical ceramics experience, combined with dedication to quality and on-time delivery, have enabled solar energy, photovoltaic, and electronics manufacturers to improve production methods and boost yields – ultimately reducing the cost of operations. We work with manufacturers to create specialized components that can withstand the unique and challenging environments.

Engineered Ceramics China Ltd. has a strong track record of supporting both horizontally and vertically-designed furnace manufacturers, supplying them with coil spacers & insulators, feedthroughs and other components. We maintain close relationships with our OEM customers – supporting assembly integrators, collaborating on design specifications, and supplying their semiconductors with components following lean and JIT manufacturing concepts.

Engineered Ceramics China Ltd. is also able to supply metalized components and assemblies for a variety of instrumentation and control applications.

Semiconductor Ceramic Properties

Extreme Temperature Resistance

Our ceramic materials can withstand temperatures up to 1700 deg C. Their dimensional stability at high temperatures makes them ideal materials for semiconductor components that see a range of temperatures.

Chemical Resistance

Ceramic materials have the ability to withstand corrosive environments such as chamber interiors. Coatings can also be applied to ceramic materials to enhance their chemical resistance.

High Strength

Ceramics are use in products such as end effectors due to their high strength and stiffness. This allows for greater accuracy than metals, which tend to deflect and poorly settle into the correct position.

Electrical Insulation

Ceramics offer excellent electrical insulation when subjected to high-frequency power supplies used for deposition.

Ceramic Semiconductor Component Applications

Tubes: Heater Coil Spacers

Standoffs: Focus Rings

Heater Components: Washers

Shadow Clamp: Plungers

Chuck Bases: Multi-Step Insulators

Mounting Rings: Chamber Liners

Filler Rings: Electrode Rings

Baffle Rings: Insulator, Rings

Insulator, Filament: Insulator, Reflector

Insulator, Body: Insulator, Suppressor

Insulator, Sleeve: Insulator, Faraday Cup

Insulator, Faraday Block: Feedthrough, Base Plate

Feedthrough, Electrode: Windows

Furnace Vaporizer: Feedthrough Assembly

Feedthrough Suppressor: Clamp, Finger

Certifications

Click below to view our Quality Certifications, Registrations and Compliance

AS9100 & ISO 9001

Engineered Ceramics China Ltd. RoHS Compliance Statement

Engineered Ceramics China Ltd. (Engineered Ceramics China Ltd.) makes no stand-alone electronic or electrical products but is proud to be a subcontractor of ceramics used in electronic and electrical products. Engineered Ceramics China Ltd. has been asked by numerous customers to confirm that our ceramics are RoHS Compliant.

After a complete bi-annual review of the materials used in our parts and the manufacturing process, we can advise you, our customers, that Engineered Ceramics China Ltd. is RoHS & RoHS 3 compliant.

January 24, 2024

RoHS stands for Restriction of Hazardous Substances and impacts the entire electronics industry and many electrical products as well. The original RoHS, also known as Directive 2002/95/EC, originated in the European Union in 2002 and restricts the use of six hazardous materials found in electrical and electronic products. All applicable products in the EU market from July 1, 2006, must pass RoHS compliance.

Directive 2011/65/EU was published in 2011 by the EU, which is known as RoHS-Recast or RoHS 2. RoHS 2 includes a CE-marking directive, with RoHS compliance now being required for CE marking of products. RoHS 2 also added Categories 8 and 9 and has additional compliance recordkeeping requirements.

Directive 2015/863 is known as RoHS 3. RoHS 3 adds four additional restricted substances (phthalates) to the list of six.

EU RoHS specifies maximum levels for the following 10 restricted substances. The first six applied to the original RoHS while the last four were added under RoHS 3, which took effect July 22, 2019.

Cadmium (Cd): < 100 ppm
Lead (Pb): < 1000 ppm
Mercury (Hg): < 1000 ppm
Hexavalent Chromium: (Cr VI) < 1000 ppm
Polybrominated Biphenyls (PBB): < 1000 ppm
Polybrominated Diphenyl Ethers (PBDE): < 1000 ppm
Bis(2-Ethylhexyl) phthalate (DEHP): < 1000 ppm
Benzyl butyl phthalate (BBP): < 1000 ppm
Dibutyl phthalate (DBP): < 1000 ppm
Diisobutyl phthalate (DIBP): < 1000 ppm

RoHS 3 (EU Directive 2015/863) adds Category 11 (catch-all) products and adds four new restricted substances – all phthalates. The four phthalates are mainly used as insulation plasticizers and are on the REACH list of SVHC (Substances of Very High Concern). The expanded list for RoHS 3 is thus as follows:

Cadmium (0.01 %)
Lead (0.1 %)
Mercury (0.1 %)
Hexavalent chromium (0.1 %)
Polybrominated biphenyls (PBB) (0.1 %)
Polybrominated diphenyl ethers (PBDE) (0.1 %)
Bis(2-ethylhexyl) phthalate (DEHP) (0.1 %)
Butyl benzyl phthalate (BBP) (0.1 %)
Dibutyl phthalate (DBP) (0.1 %)
Diisobutyl phthalate (DIBP) (0.1 %)

Download a PDF of our registration letter here.

Semiconductor Processing